| 摘要 |
PROBLEM TO BE SOLVED: To provide a method of fabricating periodic domain inversion structure capable of reducing a manufacturing cost. SOLUTION: A nonlinear optical ferroelectric material substrate is prepared. Photoresist layers are formed on the upper surface and lower surface of the substrate, and a periodic grating formed by interference of two laser beams is used for exposing the photoresist layer of the upper surface. At the same time, the substrate transmits two laser beams and the periodic grating is used for exposing the photoresist layer of the lower surface. A developing process is performed to form a periodic photoresist pattern on the two surfaces of the substrate. A conductive layer is formed above the substrate to cover the photoresist pattern and the exposed substrate surface. The photoresist pattern and a portion of the conductive layer thereon is removed by a lift-off technique. A voltage is applied to the substrate via a remaining conductive layer to polarize a plurality of parts of the substrate. COPYRIGHT: (C)2008,JPO&INPIT
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