发明名称 |
APPARATUS AND METHOD OF TRANSPORTING AND LOADING PROBE DEVICES OF A METROLOGY INSTRUMENT |
摘要 |
The preferred embodiments are directed to a probe cassette for a scanning probe microscope that includes a base having at least one probe storage receptacle, a lid mountable on the base with the probe storage receptacle at least substantially covering the at least one receptacle, and a probe retainer that retains a probe device of the scanning probe microscope in the receptacle under a compressive force. The probe cassette can be pre-loaded and shipped to a user site where the cassette can be loaded in an AFM without manual manipulation of the individual probe devices.
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申请公布号 |
US2008006083(A1) |
申请公布日期 |
2008.01.10 |
申请号 |
US20060426461 |
申请日期 |
2006.06.26 |
申请人 |
FEINSTEIN ADAM J;WILSON MATTHEW R |
发明人 |
FEINSTEIN ADAM J.;WILSON MATTHEW R. |
分类号 |
G01B5/28 |
主分类号 |
G01B5/28 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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