发明名称 |
Method of manufacturing at least one semiconductor component and memory cells |
摘要 |
A method of manufacturing at least one NAND-coupled semiconductor component is disclosed. A layer structure is formed on or above a semiconductor substrate. The layer structure is patterned to expose at least one region to be doped. The exposed region is doped and annealed. The patterned layer structure is at least partially removed. Replacing material is formed in the region in which the patterned layer structure has been removed, thereby forming the at least one NAND-coupled semiconductor component.
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申请公布号 |
US2008009115(A1) |
申请公布日期 |
2008.01.10 |
申请号 |
US20060483968 |
申请日期 |
2006.07.10 |
申请人 |
WILLER JOSEF;NAGEL NICOLAS |
发明人 |
WILLER JOSEF;NAGEL NICOLAS |
分类号 |
H01L21/336 |
主分类号 |
H01L21/336 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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