发明名称 TERMINAL ELECTRODE, SEMICONDUCTOR DEVICE AND MODULE
摘要 <P>PROBLEM TO BE SOLVED: To highly efficiently capture ACF (Anisotropic Conductive Film) particles on a protruding electrode in joining the protruding electrode through an anisotropic conductive layer. <P>SOLUTION: Exposure and development of a photosensitive resin layer 4 are executed to form an opening 5 on a pad electrode 2. Electroless plating is used to form a conductive layer 6 connected to the pad electrode 2 up to the height of the middle of the opening 5, and thus, a step difference is provided between the photosensitive resin layer 4 and the conductive layer 6. <P>COPYRIGHT: (C)2008,JPO&INPIT
申请公布号 JP2008004967(A) 申请公布日期 2008.01.10
申请号 JP20070246979 申请日期 2007.09.25
申请人 SEIKO EPSON CORP 发明人 YUZAWA TAKESHI
分类号 H01L21/60 主分类号 H01L21/60
代理机构 代理人
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