发明名称 Micro-electro-mechanical system (MEMS) variable capacitors and actuation components and related methods
摘要 Micro-electro-mechanical system (MEMS) variable capacitors and actuation components and related methods are provided. A MEMS variable capacitor can include first and second feed lines extending substantially parallel to one another. Further, MEMS variable capacitors can include first and second capacitive plates being spaced apart from the first and second feed lines. The first and second capacitive plates can be separately movable with respect to at least one of the first and second feed lines for varying the capacitance between the first and second feed lines over a predetermined capacitance range.
申请公布号 US2008007888(A1) 申请公布日期 2008.01.10
申请号 US20070715676 申请日期 2007.03.08
申请人 WISPRY INC. 发明人 MORRIS ARTHUR S.III;HUANG JOHN Q.
分类号 H01G5/16 主分类号 H01G5/16
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