DEVICE FOR CELLULAR ELECTROPHYSIOLOGY SENSOR, CELLULAR ELECTROPHYSIOLOGY SENSOR USING THE DEVICE, AND METHOD FOR MANUFACTURING THE CELLULAR ELECTROPHYSIOLOGY SENSOR DEVICE

摘要

Provided is a cellular electrophysiology sensor, which reduces a leakage current on its chip side face. The cellular electrophysiology sensor includes a sensor chip having a conduction hole, and a chip holding portion covering the side face of the sensor chip. This sensor chip is mainly composed of silicon, and the chip holding portion is made of glass and adhered to the sensor chip side face by a glass welding. As a result, the cellular electrophysiology sensor can enhance the gas tightness between the sensor chip side face and the chip holding portion so that the leakage current can be resultantly reduced.