METHOD OF MICROWAVE PLASMA TREATMENT AND APPARATUS THEREFOR

摘要

It is intended to generate a plasma of high electron density at low temperature and carry out plasma treatment therewith. There is provided a method comprising performing a microwave excitation of plasma generation gas to thereby generate plasma and exposing a treatment object thereto so as to attain plasma treatment of the treatment object, wherein either a mixed gas consisting of Xe gas and Ne gas or Xe gas alone is used as the plasma generation gas.