| 摘要 |
Methods and apparatus are provided for controlling a depth of a cavity be tween two layers of a light modulating device. A method of making a light mo dulating device includes providing a substrate, forming a sacrificial layer over at least a portion of the substrate, forming a reflective layer over at least a portion of the sacrificial layer, and forming one or more flexure c ontrollers over the substrate, the flexure controllers configured so as to o perably support the reflective layer and to form cavities, upon removal of t he sacrificial layer, of a depth measurably different than the thickness of the sacrificial layer, wherein the depth is measured perpendicular to the su bstrate.
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