| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an arrangement for generating extreme ultraviolet radiation by which electrodes can be reproduced and a long lifetime of the electrodes is prolonged. <P>SOLUTION: According to the invention, this object is met by providing coated electrodes in the form of two endless strip electrodes 21, 22 which circulate over guide rollers 23 and which have at a short distance between the electrodes an area in which electric discharge 61 takes place. The coating is at least partially sacrificed through excitation by an energy beam and generation of plasma, and means 3 for driving each strip electrode 21, 22 are arranged in such a way that during a revolution the strip electrodes 21, 22, after immersion in a molten metal 26, are guided through a wiper 27 for generating a defined thickness of coating material, are directed in a vacuum chamber 1 to a location where the desired generation of plasma 6 takes place, and are guided back into the molten metal 26 after the electric discharge 61 in order to regenerate the coating and to make electric contact between the electrodes 21, 22 and a pulsed high-voltage source 4. <P>COPYRIGHT: (C)2008,JPO&INPIT |
