| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a semiconductor wafer container which can prevent friction due to opening/closing of a cover as well as occurrence of dust in the semiconductor wafer container for housing semiconductor wafers. <P>SOLUTION: The semiconductor wafer container is provided with a main body 1 for housing semiconductor wafers 4 horizontally and a cover 2 for sealing the main body 1. In this case, a check valve mechanism 3 is provided to the main body 1 or the cover 2, so as to evacuate the main body 1 and establish negative pressure inside the main body 1. Thus, the main body 1 and the cover 2 are sealed and fixed together without producing friction. <P>COPYRIGHT: (C)2008,JPO&INPIT |
