| 摘要 |
<P>PROBLEM TO BE SOLVED: To improve the treatment capability by increasing the efficiency of removing a powder and a substance forming a powder in the prior stage to the decomposition apparatus for perfluorides. <P>SOLUTION: A gas containing perfluorides and either a powder or a substance forming a powder are supplied to a mixing part 14 of a powder removal apparatus 1. In the mixing part, a pipe 15 for supplying the gas containing perfluorides and either the powder or the substance forming a powder and a pipe 13 for supplying water to the mixing part from a circulation pump 12 are installed and using the water flow supplied to the mixing part, the gas containing perfluorides and either the powder or the substance forming a powder are sucked and mixed with water. In the mixing part, the gas is formed in fine bubbles to increase the efficiency of contact with water to remove the powder or the substance forming a powder. After removal of the powder or the substance forming a powder, the gas containing perfluorides is supplied to the perfluoride decomposition apparatus to decompose the perfluorides. <P>COPYRIGHT: (C)2008,JPO&INPIT |
