| 摘要 |
PROBLEM TO BE SOLVED: To provide an actuator in which a desired behavior of a mass part can be obtained by highly accurately detecting the behavior of the mass part. SOLUTION: The actuator 1 is so composed to turn the mass part 21 while torsionally deforming elastic parts 24 and 25 by operating a deriving means, and has a behavior detection means which detects the behavior of the mass part 21, the behavior detection means has: a first piezoresistor provided on at least one of the pair of elastic parts 24 and 25; and a second piezoresistor provided at the position where the temperature condition is substantially the same as that of the first piezoresistor and the stress due to the turning drive of the mass part 21 substantially does not affect, wherein the behavior detection means detects the behavior of the mass part 21 on the basis of the variations in the values of the first and the second piezoresistor. COPYRIGHT: (C)2008,JPO&INPIT
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