| 摘要 |
PROBLEM TO BE SOLVED: To perform contamination-free mass analysis by sampling micro-foreign matters of severalμm that become cause of device faults or the like. SOLUTION: The sampling and heating of micro-foreign matters can be performed by the same probe by providing a local heating mechanism to the leading end part of the probe for sampling the micro-foreign matters of severalμm. Since the probe can be mounted directly on a mass spectrometer, contamination-free analysis can be performed. Furthermore, by heating only the foreign matter of the leading end part of the probe, the part other than the leading end part of the probe will not be heated, even if a contaminants adhere to parts, other than the leading end part of the probe, and a mass spectrum that is satisfactory in S/N ratio can be obtained. COPYRIGHT: (C)2008,JPO&INPIT
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