发明名称 One Hundred Millimeter SiC Crystal Grown on Off-Axis Seed
摘要 A semiconductor crystal and associated growth method are disclosed. The crystal includes a seed portion and a growth portion on the seed portion. The seed portion and the growth portion form a substantially right cylindrical single crystal of silicon carbide. A seed face defines an interface between the growth portion and the seed portion, with the seed face being substantially parallel to the bases of the right cylindrical crystal and being off-axis with respect to a basal plane of the single crystal. The growth portion replicates the polytype of the seed portion and the growth portion has a diameter of at least about 100 mm.
申请公布号 US2008008641(A1) 申请公布日期 2008.01.10
申请号 US20060428954 申请日期 2006.07.06
申请人 发明人 LEONARD ROBERT T.;BRADY MARK;POWELL ADRIAN
分类号 C01B31/36 主分类号 C01B31/36
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