发明名称 APPARATUS AND METHOD FOR PRODUCING REFLECTOR MIRROR
摘要 <p>Disclosed is an apparatus for producing a reflector mirror which enables to simplify the production process while reducing operation time. Also disclosed is a method for producing a reflector mirror. Specifically disclosed is a film-forming apparatus (1) wherein a metal evaporation source (22) for forming a reflective film, a dye evaporation source (23) for forming a color film, and a plasma polymerization source (electrode) (24) for forming a protective film are arranged in one vacuum processing chamber (5). By performing a reflective film-forming step, a color film-forming step and a protective film-forming step in the common vacuum processing chamber (5), the production process can be simplified and the operation time can be reduced.</p>
申请公布号 WO2008004397(A1) 申请公布日期 2008.01.10
申请号 WO2007JP61528 申请日期 2007.06.07
申请人 KOBAYASHI, YOSUKE;ULVAC, INC.;IIJIMA, MASAYUKI;HIRAYAMA, KOUJI;HASHIMOTO, YUSUKE;HAMADA, RYUJI;MOMONO, KEN;NAKATSUKA, ATSUSHI 发明人 IIJIMA, MASAYUKI;KOBAYASHI, YOSUKE;HIRAYAMA, KOUJI;HASHIMOTO, YUSUKE;HAMADA, RYUJI;MOMONO, KEN;NAKATSUKA, ATSUSHI
分类号 G02B5/10;C23C14/56;F21S8/10;F21V7/00;F21V17/00 主分类号 G02B5/10
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