| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a polishing surface plate which facilitates the exchange of polishing cloth, extends an interval of time for disassembling and cleaning the polishing surface plate, and automatically informs a worker of the time for disassembling and cleaning when it comes. <P>SOLUTION: In the polishing surface plate 1, a vacuum receiving base 7 having a cleaning liquid and a gas circulation chamber 7b at a bottom is fixed to the upper surface of a base 18 having passages for a cleaning liquid introduction pipe 13a, a gas exhaust pipe 13b, and a gas supply pipe 16, and a porous ceramic support base 3 having the polishing cloth 3a to be attached is mounted to the upper surface. The pressure of the cleaning liquid and the gas circulation chamber is detected by a vacuum pressure detection sensor 59. When the vacuum pressure V<SB>i</SB>detected by the vacuum pressure detection sensor reaches a barrier value V<SB>a</SB>of the vacuum pressure to be stored or the value exceeding the value, an electronic switch is operated, a drive motor M of a polishing device is stopped or an alarm is transmitted. <P>COPYRIGHT: (C)2008,JPO&INPIT |
