| 摘要 |
PROBLEM TO BE SOLVED: To provide an infrared sensor in which a detection element is supported stably at a prescribed height position over a substrate, while improving the thermal insulation performance of an infrared detection element. SOLUTION: The infrared detection element 30 is held on a sensor seating 40 made of a porous material, and leads 32 extending from the detection element 30 are supported at the upper ends of anchor protrusions 52, protruding from terminal lands 50 in the upper surface of a substrate 10. The leads 32 are formed in beams 42, extending from the sensor seating 40, and one ends of the beams 42 are connected to the upper ends of the anchor protrusions 52. The anchor protrusions support the detection element 30, in a form of being separated from the upper surface of the substrate 10 via the leads 32 and support the sensor seating 40 at the substrate 10 via the beams 42. COPYRIGHT: (C)2008,JPO&INPIT
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