| 摘要 |
PROBLEM TO BE SOLVED: To provide an XY stage that can accurately position a processing means to a target member of a large area. SOLUTION: This XY stage includes a platen having a guide surface consisting of a plurality of blocks made of a stone material and divided in the Y-axis direction, guide members installed on the guide surface consisting of a first rail extending in the Y-axis direction and a second rail having a portion that overlaps the first rail when viewed from a plane, and a gantry supported by a slide base that moves along the guide members, a Y-axis linear motor that drives the slide base, and a plurality of second slide members fixed on the gantry and arrayed in the X-axis direction, and further includes a positioning means that includes a base fixed on the gantry, a slider that travels along the rail portions, an X-axis linear motor that drives the slider, a pair of positioning holes provided in the base, positioning pins passed through each positioning holes to be fixed into the gantry, and adjustment bolts that rotate the base using the positioning pins as fulcrums. COPYRIGHT: (C)2008,JPO&INPIT
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