| 摘要 |
A method and an apparatus for correcting a pattern are provided to correct an electrode disconnected portion, etc., with a thin wire of about 10 micrometer, and reduce contamination around a defective portion. A hole(3a) of a film(3) and a defective portion(2a) of an electrode(2) are positioned with a gap(G) maintained therebetween. The film(3) is pressed onto a substrate(1) by covering the hole(3a) with a planarized surface of a front end of an application needle with correction paste attached thereto. The correction paste is applied to the defective portion(2a), and then, the application needle is retreated to allow the film(3) to be separated from the substrate(1) by virtue of a restoration force of the film(3). Accordingly, the correction paste can be prevented from intruding into a gap between the film(3) and the substrate(1) according to capillary. |
