| 摘要 |
A glass mask for patterning, a manufacturing method and a manufacturing device of the same are provided to prevent the bending of the mask by using the glass mask having a structure in which a plurality of sheets of glass plates are superimposed with each other. A glass mask for patterning includes a plurality of sheets of glass plates(101) and a pattern forming layer(103). The pattern forming layer is held by at least one glass plate. The glass mask further includes a transmissive member inserted into the plural glass plates. The transmissive member is made of an adhesive material. The pattern forming layer is made of a material containing at least one of silver salt emulsion, chrome, and oxide chrome. The glass plate is composed of any one of soda lime glass, high strain point glass, quartz glass, synthetic quartz glass, borosilicate glass, aluminosilicate glass, lead glass, and boric acid glass. |
