MULTIPLE CHANNEL INTERFEROMETRIC SURFACE CONTOUR MEASUREMENT SYSTEM

摘要

Described is a crossbar for improved orientation stability between two system components in an interferometric measurement system, the crossbar comprising: an outer cylindrical tube having a tube axis, an inner surface and two ends; an inner cylindrical tube having a tube axis collinear with the tube axis of the outer tube and having an outer surface and two ends, the inner cylindrical tube disposed inside the outer tube and extending outside the two ends of the outer cylindrical tube, each end of the inner cylindrical tube adapted for attaching one of the system components; and a pair of O-rings disposed between the inner surface of the outer cylindrical tube and the outer surface of the inner cylindrical tube, each O-ring being disposed along a length of the inner cylindrical tube at a predetermined position to reduce changes in the orientation between the two system components as the crossbar is reoriented.