| 摘要 |
A composition comprises a polymer which contains hydroxyl groups, the composition is suitable as a coating for an IR-imagable lithographic precursor, the composition comprising one or more agent(s) which: <SL> <LI>a) absorbs IR radiation of wavelength greater than 800 nm and consequently generates heat; <LI>b) functions as an insolubiliser which inhibits dissolution of non-imaged regions of the coating in a developer but permits dissolution of imaged regions during development; and <LI>c) improves the inhibition to dissolution of the non-imaged regions and/or the dissolution of the imaged regions so as to improve the dissolution contrast ratio (DCR) of the non-imaged/imaged regions; wherein the agent which performs function c) comprises a moiety which has hydrophobic and ionic character. </SL> Such a composition can show excellent selectivity as regards dissolution rates in developer, as between the imaged and non-imaged areas, whilst the energy needed to achieve this differentiation (or "operating speed") is not compromised. In the preferred embodiments, the polymer is a Novolac resin, whilst the ionic components are exemplified in table 2. |
