Device for measuring forces, in particular a pressure sensor and manufacturing method therefore

摘要

The device i.e. pressure sensor (1), has a deformation body (2) that is deformable due to pressure and measuring units (4a, 4b) that alter the deformation of the body in an electrical measuring signal. The measuring units are arranged in a flat substrate (6) made of monocrystalline quartz. The substrate is fastened at the deformation body such that the deformation of the body results in the deformation of the substrate. The thickness of the substrate in the region of the measuring units is smaller than the thickness of the body in the region. An independent claim is also included for a method of manufacturing a device for measuring forces, in particular a pressure sensor.