| 摘要 |
A substrate transfer equipment and a substrate processing system using the same are provided to minimize a footprint(a floor area) of a transfer chamber by maximizing a substrate processing amount. A substrate transfer equipment(150) includes a first blade(152), a second blade(154), an arm unit(160), and a driving unit. The substrate transfer equipment transfers a substrate to a process chamber(150). The first blade and the second blades support a substrate at different heights. The arm unit is connected to the first blade and the second blades. The arm unit moves the first blade and the second blade. The driving unit drives the first and second blades, and the arm unit. The first and second blades are unfolded and folded while rotating on the same axial line of the arm unit. The first blade and the second blade rotate in different directions. The driving unit includes a first blade driving portion and a second blade driving portion. The first and second blade driving portions rotate the first and second blades in the different directions.
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