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发明名称
MEMS SENSOR COMPRISING A DEFORMATION-FREE BACK ELECTRODE
摘要
申请公布号
EP1874678(A1)
申请公布日期
2008.01.09
申请号
EP20070700207
申请日期
2007.01.10
申请人
AUSTRIAMICROSYSTEMS AG
发明人
SCHRANK, FRANZ
分类号
B81B3/00;H04R19/00
主分类号
B81B3/00
代理机构
代理人
主权项
地址
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