| 摘要 |
PROBLEM TO BE SOLVED: To provide an electrostatic chuck and its manufacturing method capable of preventing the occurrence of arching, at a low manufacturing cost. SOLUTION: The electrostatic chuck comprises a plate-like ceramics dielectric substrate, a film electrode formed on one surface of the ceramics dielectric substrate, an inorganic member which is integral with or separate from the ceramics dielectric substrate and arranged on the outer periphery of the film electrode, and a support substrate jointed to one surface of the ceramics dielectric substrate through an adhesive layer. The method for manufacturing the electrostatic chuck includes a step for preparing the plate-like ceramics dielectric substrate, a step for providing a groove that has a bottom surface shape corresponding to the substrate shape on one surface of the ceramics dielectric substrate, a step for forming the film electrode on the bottom surface of the groove, and a step where one surface is bonded to the support substrate through an adhesive layer. COPYRIGHT: (C)2005,JPO&NCIPI |
