| 发明名称 |
ARTICLE FOR REDUCING METAL CONTAMINATION |
| 摘要 |
[PROBLEMS] To provide a means for preventing metal contamination especially for an article to be used in a field which requires metal contamination reduction. [MEANS FOR SOLVING PROBLEMS] An article wherein a titanium oxide film is formed on sections in contact with liquid or vapor is provided.
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| 申请公布号 |
KR20080003927(A) |
申请公布日期 |
2008.01.08 |
| 申请号 |
KR20077027410 |
申请日期 |
2007.11.23 |
| 申请人 |
AQUA SCIENCE CORPORATION |
发明人 |
YAMASE MASAO;YAMAGUCHI RYUTA;SAITO KOICHI |
| 分类号 |
C23C8/12;C23C8/16;H01L21/304 |
主分类号 |
C23C8/12 |
| 代理机构 |
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代理人 |
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