发明名称 Spatial light modulator fourier transform
摘要 A filter to selectively block light from passing through the filter and to selectively permit light to pass through the filter. The filter includes an array with a plurality of individually addressable filter elements. Each filter element is selectively settable to have a variable transmittance to the light of between substantially zero percent and substantially one hundred percent. In this manner, the filter according to the present invention provides areas that pass only a portion of the light, and thus can block the light using patterns other than just an abrupt on/off filtering. By so doing, the filter is able to dramatically reduce, and in some embodiments eliminate, the light ringing that typically accompanies such on/off filters.
申请公布号 US7317527(B1) 申请公布日期 2008.01.08
申请号 US20040999017 申请日期 2004.11.29
申请人 KLA-TENCOR TECHNOLOGIES CORPORATION 发明人 MACIUCA DRAGOS;CHEN GRACE H.;FU TAO-YI
分类号 G01J4/00 主分类号 G01J4/00
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