MULTIPLE NOZZLE EVAPORATOR FOR VACUUM THERMAL EVAPORATION

摘要

A multiple nozzle evaporator for a vacuum thermal evaporation process is provided to fabricate a uniform thin-film on a large scale substrate by arranging a plurality of evaporation pipes toward an outer of a substrate. A furnace(31) has a rectangular pillar shape and an upper section being opened. A body unit has a rectangular shape shorter than the furnace and is assembled on the upper section of the furnace. A plurality of evaporation pipes pass through the upper section and a lower section of the body unit. A nozzle unit(32) includes the body unit and the evaporation pipes. The evaporation pipes are divided into two groups The two groups are opposite to each other and have a same tilt angle with respect to a center axis on an upper surface of the body unit. Alternatively, the evaporation pipes are divided into four groups and the four groups have tilt angles toward four vertex directions.