| 摘要 |
An arrangement structure of vacuum chambers is provided to install pumps for vacuum chambers in one unit to improve practical use of the pumps while reducing the prime cost. A first vacuum chamber(100a) and a second vacuum chamber(100b) are arranged at right and left of a loadlock chamber(140). A pump unit(120) is connected with the first vacuum chamber and the second vacuum chamber for performing vacuum exhaust and atmosphere opening. The pump unit has six pumps connected with one another, wherein the pumps are operated simultaneously or independently in accordance with vacuum exhaust volume of a vacuum pump. Valves(110a,110b) are installed between each vacuum chamber and the pump unit.
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