APPARATUS OF MANUFACTURING PLATINUM-FAMILY CATALYST COATED SUBSTRATE FOR ELECTRODES OF ELECTROCHEMICAL CELL BY PLASMA AND MANUFACTURING METHOD USING THE SAME

摘要

A system for producing a Pt-based metal thin film for an electrode catalyst by using plasma discharge is provided to allow simple and prompt production of a Pt-based metal thin film, to increase the productivity by simplifying the overall process and reducing the processing time, and to improve the efficiency in generating hydrogen or electricity. A system for producing a Pt-based metal thin film for an electrode catalyst by using plasma discharge comprises: a mixed gas injection unit for injecting a mixed gas of hydrogen with inert gas; a plasma reactor(6) including a pair of electrodes formed of a first electrode(5) having an insulator(4) surrounding the electrode surface and a substrate(3) coated with a thin film(S) of a Pt-based metal-containing compound and formed on the insulator, and a second electrode(1) having an insulator(2) surrounding the electrode and spaced apart from the thin film of the Pt-based metal-containing compound coated on the surface of the first electrode by a predetermined distance(d) so that the mixed gas passes therethrough; and a power supply unit(7) connected to the first electrode and the second electrode to cause plasma discharge.