| 摘要 |
A method for manufacturing an LCD(Liquid Crystal Display) device is provided to form an active layer, a source electrode, and a drain electrode with a mask by using a diffracted exposure mask, thereby reducing the number of masks less than a six mask process for the prevention of misalign. A method for manufacturing an LCD device comprises the following steps of: forming a first substrate key(51) in a dummy area of a substrate(30); forming a gate line having a gate electrode(32a) on the substrate; forming a gate insulating layer(34,36) on the substrate with the gate electrode; forming a second substrate key(52) in an area of the substrate; forming a data line(39a) and the source electrode(39b), drain electrode(39c) and active layer(37a) of a TFT so as to be disposed to across the gate line by using a diffracted exposure mask to define a pixel area; forming a protection layer(42) in the front of the substrate so as to form a first contact hole on the drain electrode; and forming a pixel electrode(45a) in the pixel area. |
