SYSTEM AND METHOD COMPRISING SAME FOR MEASUREMENT AND/OR ANALYSIS OF PARTICLES IN GAS STREAM

摘要

A system for measuring and/or analyzing of particles in a gaseous feed stream and a method including the same are provided to efficiently measure particle contents in the gaseous feed stream. A system(10) for measuring and/or analyzing particles in a gaseous feed stream is received in a ventilated enclosure and exists at room temperature. The gaseous feed stream is supplied from a storage tank, a pressurized gas cylinder, a transfill line, a gas distribution line or a supply source(20) as other devices. The system further includes an inert gas source(30) used for inert gas purging or other devices. An inert gas purification system(35) is in fluid communication with the inert gas supply source and supplies purified inert gas for pursing/flushing operation. A particle measuring system(50) and/or a particle capture filter(60) is used for measuring and detecting particles in gaseous feed stream.