APPARATUS FOR EVAPORATION OF ORGANIC LIGHT-EMITTING DEVICE(OLED) AND METHOD FOR CONTROLLING MOTION MODULE OF THE APPARATUS

摘要

A deposition apparatus for an organic light emitting device and a method for controlling a driving module are provided to improve a process speed of a substrate by decreasing a standby time for the substrate during transfer. An inline type OLED(Organic Light Emitting Device) deposition apparatus includes deposition members arranged in one row. A process chamber(10) includes a chamber inlet hole and a chamber outlet hole. A deposition process is performed in the process chamber. Driving modules(42,44) transfer the substrate in the process chamber. A vaporization source(20) is formed at a lower portion of the respective chamber and evaporates a vaporization material. A source shutter(30) is formed on the vaporization source and opens and closes the vaporization source. The driving module includes a first driving module which is formed at the chamber inlet hole, and a second driving module which is formed at the chamber outlet hole.