| 摘要 |
A seal dispenser and a control method thereof are provided to measure a section of a seal pattern on a substrate exactly and automatically and update an air pressure which will be supplied to an injection vessel, so that the seal pattern can have a uniform section(uniform width and thickness) and accordingly a process for forming the seal pattern can be effectively performed. A nozzle(12A) dispenses seal(16) on a substrate(14) installed in an injection vessel(12). A sensor detects a state of a seal pattern dispensed on the substrate. A valve controls an air pressure which will be supplied to the injection vessel. A controller(28) controls the value based on a signal from the sensor. The nozzle is spaced from a surface of the substrate as much as about 2mum. The sensor includes a photo coupler(12B) for irradiating light to the seal pattern on the substrate and converting distribution of light, reflected by the substrate, into an electric signal. |
