| 摘要 |
A dielectric green sheet containing a dielectric ceramic powder, a conductive green sheet containing a metal powder, and a firing assistant green sheet containing an inorganic oxide material powder are respectively produced. A laminate is formed by stacking these green sheets in layers in the following order: firing assistant green sheet, conductive green sheet, dielectric green sheet, conductive green sheet and firing assistant sheet. The thus-formed laminate is then subjected to firing. During this firing process, the bonding strength at the interface between the conductive green sheet and the firing assistant green sheet is decreased and the oxygen partial pressure in the firing atmosphere is changed at least once, thereby separating a firing assistant member as the sintered body of the firing assistant green sheet from a thin-film capacitor as the sintered body of the capacitor part. Consequently, this method for manufacturing a thin-film capacitor enables to manufacture a thin-film capacitor having excellent reliability highly efficiently at low cost without affecting the characteristics.
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