Vent Closing Method And The Use Of An Ultrasonic Bonding Machine For Carrying Out The Method

摘要

The inventive method for closing a vent ( 9 ) formed in a microstructure ( 3 ) wall ( 10 ) under a controlled atmosphere is carried out by an ultrasonic bonding machine comprising a welding electrode ( 14 ), a metal wire ( 13 ) crossing the electrode ( 14 ) and a working table ( 15 ). A ball ( 12 ) is formed by melting on the end part of the metal wire ( 13 ) and is deposited on the end of the vent ( 9 ) and a holding plug ( 11 ) and is subsequently exposed to compression forces (F) and ultrasonic vibration (F_us) by the electrode ( 14 ) in a controlled atmosphere chamber ( 17 ).