发明名称 MODULE FOR CONTROLLING BAKE UNITS INDEPENDENTLY AND BAKE APPARATUS WITH THEREOF
摘要 A modular device for controlling a bake unit and a bake apparatus including the same are provided to independently control plural bake units which are respectively installed in a housing, thereby effectively operating the bake apparatus. A detachably housing is mounted in a bake unit(110), and a bake control module(120) is installed in the housing to control power supply and operation of the bake unit. The bake control module controls operation of a hot plate of the bake unit, operation of a cool plate, input and output of a signal, A/D conversion of input/output signal and power supply of the bake unit, and monitors the operation of the bake unit.
申请公布号 KR20080001214(A) 申请公布日期 2008.01.03
申请号 KR20060059394 申请日期 2006.06.29
申请人 SEMES CO., LTD. 发明人 LEE, JUNG HYUN;CHOI, KWANG IL
分类号 H01L21/324;H01L21/477 主分类号 H01L21/324
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