| 发明名称 |
GRIPPER DEVICE FOR WAFER CASSETTE TRANSFER AND TRANSFER METHOD |
| 摘要 |
<p>A gripper device for transferring a wafer cassette and a transferring method of the same are provided to grip correctly a wafer cassette by altering a shape of a gripper. A gripper(120) includes a grip arm(121), a gripping unit(122), and a sensing unit(123) in order to transfer a wafer cassette(100). The grip arm is obliquely to a transferring robot arm in order to be operated. The gripping unit is connected to an end of the grip arm in a predetermined shape. The sensing unit is installed at a bottom surface of the gripping unit and comes in contact with the wafer cassette in order to sense a wafer cassette or to a gripping state of the wafer cassette.</p> |
| 申请公布号 |
KR100791671(B1) |
申请公布日期 |
2008.01.03 |
| 申请号 |
KR20060080345 |
申请日期 |
2006.08.24 |
| 申请人 |
DONGBU ELECTRONICS CO., LTD. |
发明人 |
KIM, MIN JOO |
| 分类号 |
H01L21/67;H01L21/677;H01L21/68 |
主分类号 |
H01L21/67 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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