发明名称 APPARATUS FOR MARKING AND VISION INSPECTION OF THE SEMICONDUCTOR DEVICE
摘要 <p>An apparatus for marking and vision inspection of the semiconductor device, more particularly, to an apparatus for marking and vision inspection of the semiconductor device which marks company logo, etc. on a surface of a semiconductor device and performs an inspection of an external appearance of a semiconductor device, the apparatus which includes a marking unit for performing a marking process in which a mark is formed on a surface of a semiconductor device; one or more vision inspection units for performing a vision inspection process in which an external appearance of a semiconductor device is examined, the vision inspection unit being installed together with the marking unit; and a sorting unit for sorting and loading semiconductor devices in accordance with inspection result for the external appearance of the vision inspection unit, is disclosed.</p>
申请公布号 WO2008001997(A1) 申请公布日期 2008.01.03
申请号 WO2007KR00275 申请日期 2007.01.17
申请人 JT CORPORATION;YOU, HONG JUN 发明人 YOU, HONG JUN
分类号 H01L21/66 主分类号 H01L21/66
代理机构 代理人
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