发明名称 DIAMOND ELECTRON RADIATION CATHODE, ELECTRON SOURCE, ELECTRON MICROSCOPE, AND ELECTRON BEAM EXPOSER
摘要 <p>Intended is to provide an electron radiation cathode of a high brightness, low energy dispersion and a long lifetime. Also intended is to provide a diamond electron radiation cathode, which can be sufficiently stably gripped, which is sharpened at its leading end and which is improved in a field intensity. The diamond electron radiation cathode (110) is characterized in that it is divided into at least three regions, that is, a leading end region (203) for irradiating a column-shaped leading end with electrons, a trailing end region (201) confronting in the longitudinal direction and adapted to be gripped, and a radially thinned intermediate region (202), in that the trailing end region has a sectional area of 0.2 mm&lt;SUP&gt;2&lt;/SUP&gt;, in that the leading region has a sharpened leading end, and in that the radially thinned intermediate region has a sectional area of 0.1 mm&lt;SUP&gt;2&lt;/SUP&gt; at most.</p>
申请公布号 WO2008001805(A1) 申请公布日期 2008.01.03
申请号 WO2007JP62885 申请日期 2007.06.27
申请人 SUMITOMO ELECTRIC INDUSTRIES, LTD.;YAMAMOTO, YOSHIYUKI;UEDA, AKIHIKO;NISHIBAYASHI, YOSHIKI;IMAI, TAKAHIRO 发明人 YAMAMOTO, YOSHIYUKI;UEDA, AKIHIKO;NISHIBAYASHI, YOSHIKI;IMAI, TAKAHIRO
分类号 H01J1/304;H01J37/073;H01L21/027 主分类号 H01J1/304
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