发明名称 |
DIAMOND ELECTRON RADIATION CATHODE, ELECTRON SOURCE, ELECTRON MICROSCOPE, AND ELECTRON BEAM EXPOSER |
摘要 |
<p>Intended is to provide an electron radiation cathode of a high brightness, low energy dispersion and a long lifetime. Also intended is to provide a diamond electron radiation cathode, which can be sufficiently stably gripped, which is sharpened at its leading end and which is improved in a field intensity. The diamond electron radiation cathode (110) is characterized in that it is divided into at least three regions, that is, a leading end region (203) for irradiating a column-shaped leading end with electrons, a trailing end region (201) confronting in the longitudinal direction and adapted to be gripped, and a radially thinned intermediate region (202), in that the trailing end region has a sectional area of 0.2 mm<SUP>2</SUP>, in that the leading region has a sharpened leading end, and in that the radially thinned intermediate region has a sectional area of 0.1 mm<SUP>2</SUP> at most.</p> |
申请公布号 |
WO2008001805(A1) |
申请公布日期 |
2008.01.03 |
申请号 |
WO2007JP62885 |
申请日期 |
2007.06.27 |
申请人 |
SUMITOMO ELECTRIC INDUSTRIES, LTD.;YAMAMOTO, YOSHIYUKI;UEDA, AKIHIKO;NISHIBAYASHI, YOSHIKI;IMAI, TAKAHIRO |
发明人 |
YAMAMOTO, YOSHIYUKI;UEDA, AKIHIKO;NISHIBAYASHI, YOSHIKI;IMAI, TAKAHIRO |
分类号 |
H01J1/304;H01J37/073;H01L21/027 |
主分类号 |
H01J1/304 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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