发明名称 METHOD FOR MAMUFACTURING A Al2O3-ZrO2 CAPILLARY FOR SEMICONDUCTOR WIRE BONDING USING INJECTION MOLDING AND CAPILLARY FOR SEMICONDUCTOR WIRE BONDING USING THEREOF
摘要 A method for manufacturing a capillary of alumina-zirconia using injection molding and a capillary for wire bonding manufactured by the same are provided to the wear resistance and durability thereof by preparing and molding slurry. 75wt.% or 85wt.% compound powder of alumina-zirconia is mixed with a binder to prepare a slurry(100). The slurry is formed in a capillary shape through injection molding(200). The formed capillary is put in a degreasing furnace and is heated to 150 to 600 deg.C to eliminate the binder. Then, the capillary is gradually heated to 1300 to 1600 deg.C and then is passively cooled(400). The sintered capillary is gradually heated to 1250 to 1500 deg.C under predetermined pressure, and then is passively cooled(500).
申请公布号 KR100791221(B1) 申请公布日期 2008.01.03
申请号 KR20060019593 申请日期 2006.02.28
申请人 发明人
分类号 H01L21/60;B29C45/00;C04B35/106 主分类号 H01L21/60
代理机构 代理人
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