发明名称 |
FABRICATION OF THREE DIMENSIONAL INTEGRATED CIRCUIT EMPLOYING MULTIPLE DIE PANELS |
摘要 |
A method of assembling an electronic device includes testing (602) a first wafer (100) of first die to identify the location of functional first die and dividing (604) the first wafer (100) into a set of panels (104-1, 104-2, 104-3), wherein a panel includes an MxN array of first die. A panel is bonded to a panel site of a second wafer to form a panel stack wherein a panel site defines an MxN array of second die in the second wafer. The panel stack is sawed (606) into a devices comprising a first die bonded to a second die. Dividing the first (100) wafer into panels may be done according statically or dynamically (to maximize the number of panels having a yield exceeding a specified threshold). Binning of the panels and panel sites according to functional die patterns may be performed to preferentially bond panels to panel sites of the same bin. |
申请公布号 |
WO2007018850(A3) |
申请公布日期 |
2008.01.03 |
申请号 |
WO2006US26256 |
申请日期 |
2006.07.03 |
申请人 |
FREESCALE SEMICONDUCTOR;JONES, ROBERT E.;POZDER, SCOTT K. |
发明人 |
JONES, ROBERT E.;POZDER, SCOTT K. |
分类号 |
H01L21/30;H01L21/46 |
主分类号 |
H01L21/30 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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