Hochpräzisionshaltevorrichtung

摘要

A high precision z-theta stage having a horizontal translation axis (z-axis) and a rotary axis (theta-axis) parallel with the translation axis comprises parallel spaced apart linear translation stages (12,13), a carriage (14) supported between the parallel translation stages, and a rotation stage (15) carried by the carriage between the parallel translation stages. Each brushless linear motor is connected to the carriage to apply translation forces in a horizontal plane intersecting the vertical center of gravity of the carriage.