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发明名称
MACRO INSPECTION APPARATUS AND MACRO INSPECTION METHOD
摘要
申请公布号
KR100791132(B1)
申请公布日期
2008.01.03
申请号
KR20067010103
申请日期
2006.05.24
申请人
发明人
分类号
G01M11/00;G01N21/84;G02F1/13
主分类号
G01M11/00
代理机构
代理人
主权项
地址
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