发明名称 Surface treatment method and device thereof
摘要 A surface treatment method is provided. A surface treatment method comprising steps of providing a first and a second conductors; applying an electrical field between the first and the second conductors; enclosing the first and the second conductors with a material whose viscosity is varied with an intensity of the electrical field; actuating the first and the second conductors such that the first and the second conductors are in a relative motion with respect to each other; and varying the intensity of the electrical field.
申请公布号 US2008000584(A1) 申请公布日期 2008.01.03
申请号 US20070900106 申请日期 2007.09.10
申请人 TSAI YAO Y;TZENG CHIEN H 发明人 TSAI YAO Y.;TZENG CHIEN H.
分类号 H01L21/306 主分类号 H01L21/306
代理机构 代理人
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