CHIP FOR CAPACITOR MICROPHONE, CAPACITOR MICROPHONE, AND METHOD FOR MANUFACTURING THE SAME

摘要

For the purpose of miniaturizing and supersensitizing a chip for a capacitor microphone formed by micromachining a silicone substrate, the silicone substrate of the chip for the microphone is diced in a generally hexagonal, desirably regular hexagonal shape, and a back air chamber is formed in a circular or regular hexagonal shape.