发明名称 ELECTRONIC DEVICE HAVING A METAL PAD STRUCTURE AND METHOD OF FABRICATION THEREOF
摘要 <p>An electronic device having a metal pad structure and a method for fabricating the same are provided to prevent generation of electrical short circuit between bonding wires formed on metal pad structures. A protective insulating layer(120) is formed on an upper surface of a substrate(100). A plurality of metal pad structures(130a) penetrate the protective insulating layer. The metal pad structures are separated from each other. The metal pad structures have upper surfaces which are positioned at a level higher than a level of the protective insulating layer. A plurality of insulating barrier spacers(140) are formed on sidewalls of the metal pad structures. The insulating barrier spacers have top surfaces which are positioned at a level higher than a level of the metal pad structures.</p>
申请公布号 KR100791080(B1) 申请公布日期 2008.01.03
申请号 KR20070006947 申请日期 2007.01.23
申请人 SAMSUNG ELECTRONICS CO., LTD. 发明人 GA, JAE WHOAN
分类号 H01L21/60;H01L23/48;H01L23/58 主分类号 H01L21/60
代理机构 代理人
主权项
地址