发明名称 |
Composition, article, its manufacture and use |
摘要 |
A composition comprising a polymer which contains hydroxyl groups, the composition being suitable as a coating for an IR-imagable lithographic precursor, the composition comprising one or more agent(s) which: a) absorbs IR radiation of wavelength greater than 800 nm and consequently generates heat; b) functions as an insolubiliser which inhibits dissolution of non-imaged regions of the coating in a developer but permits dissolution of imaged regions during development; and c) improves the inhibition to dissolution of the non-imaged regions and/or the dissolution of the imaged regions so as to improve the dissolution contrast ratio (DCR) of the non-imaged/imaged regions; wherein the agent which performs function c) comprises a moiety which has hydrophobic and ionic character. Such a composition can show excellent selectivity as regards dissolution rates in developer, as between the imaged and non-imaged areas, whilst the energy needed to achieve this differentiation (or“operating speed”) is not comprised. |
申请公布号 |
AU2007263607(A1) |
申请公布日期 |
2008.01.03 |
申请号 |
AU20070263607 |
申请日期 |
2007.07.02 |
申请人 |
HEIDELBERG ASIA PROCUREMENT CENTER SDN, BHD |
发明人 |
ROBERTO MASSIMO ALLEGRINI;PETER ANDREW REATH BENNETT |
分类号 |
B41C1/10 |
主分类号 |
B41C1/10 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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