| 摘要 |
A holding apparatus for a substrate cassette include a support base for holding the cassette with substrates. A tilting device is fixed to the support base for allowing the support base to rotate about a horizontal axis from a horizontal position, wherein top surfaces of the substrates are arranged upwardly, to an over vertical position, wherein the top surfaces of the substrates are arranged downwardly, by rotating the support base over 90 degrees. A storage method for a substrate cassette includes steps of storing a substrate in the cassette for substrates almost horizontally, fixing a cassette on a support base, and rotating the support base around a rotary shaft so that the substrate may rotate to the angle beyond 90 degrees.
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